Sensitive pressure control of carrier gases and air-over-liquid systems of solvents or pure water in semiconductor applications. The Selection Guide provides a summary of the Stainless Steel Precision Pressure Regulators. The PRS100 / HPRS100 Series variations include:

  • 316 Stainless Steel Body
  • FKM / PTFE Internal Wetted Parts
  • 0.15 PSI Standard Sensitivity
  • Low Air Consumption Standard
  • Non-Constant Bleed Options Available
  • RoHS Compliance