• MP Series – Versatile Dispensing Pump

    Versatile Dispensing Pumps - MP Series
    • Simple Structure / Two volumes – 0.014 or 0.307 ml
    • Applies Grease in Consistent Amounts
    • Highly Consistent & Repeatable
    • Fast & Easy to Bleed Air
  • F-APP Series – Parallel Tubephragm Pump

    Pneumatic Parallel Tubephragm Pump
    • Combines 8-shaped Cross Section Tube with Bellows
    • No Sliding Portion, No Generation of Particles
    • Rare Crystallization of Electrolytes, No Outside Air
    • Periodic Maintenance Not Required
  • F-APB Series – Pneumatic Bellows Pump

    Pneumatic Bellows Pump
    • Fluorine Resin Contact Area / Resistant to Chemicals
    • Designed to Virtually Avoid Particle Generation
    • Constant Dispensing at High Repeatability of Volume
    • Daily Maintenance is Not Required
  • F-EPB Series – Electric Bellows Pump

    Electric Bellows Pump
    • Fluorine Resin Contact Area / Resistant to Chemicals
    • Designed to Virtually Avoid Particle Generation
    • Constant Dispensing at High Repeatability of Volume
    • Daily Maintenance is Not Required
  • F-EPT Series – Coaxial Tubephragm Pump

    Electric CT Pump
    • Step or Servo Motor Driven, Compact, High Precision
    • Designed for Photoresist Requirements
    • Highly Reliable Simple Construction
    • Good Removal of Bubbles
  • F-EPP Series - Parallel Tubephragm Pump

    Electric Parallel Tubephragm Pump
    • Combines 8-shaped Cross Section Tube with Bellows
    • Step or Servo Motor Driven, Compact, High Precision
    • No Sliding Portion, No Generation of Particles
    • Rare Crystallization of Electrolytes, No Outside Air
  • CT / PT / HT Series - AC Servo Drive Pumps

    AC Servo Drive Pump
    • Ideal for FPD Processes
    • High Precision / Constant Dispensing
    • Resist Coating with Minimal Pulsing Enabled
    • Achieves Optimum Performance for Slit Coating
  • F-EPR Series – Rigid Tubephragm Pump

    Electric Rigid Tubephragm Pump
    • Similar Characteristics to Plunger or Syringe Design
    • Constant Dispensing & Flow in Microscopic Discharge
    • Eliminates Coating Uniformity Failures
    • Improves on Slit Coating Startup